Sensor structures, systems and methods with improved integration and optimized footprint

A sensor device comprising:

• a substrate;
• a plurality of support elements spaced apart from each other, wherein each of the support elements has a first end arranged on the substrate, a circumferential top surface, a circumferential bottom surface, and a single concave radial side wall between the circumferential top surface and the circumferential bottom surface;
• and
• a moveable element supported on second ends of each of the plurality of support elements, and spaced apart from the substrate by the plurality of support elements, the second ends of the plurality of support elements being opposite the respective first ends,
• wherein the moveable element, the substrate and the plurality of support elements define a cavity into which the moveable element can deflect in response to a physical quantity to be sensed by the sensor device.

A method comprising:

• providing a substrate;
• providing a moveable element supported on the substrate by second ends of each of a plurality of support elements spaced apart from each another, each of the plurality of support elements having a first end arranged on the substrate, a circumferential top surface, a circumferential bottom surface, the second end, and a single concave radial side wall between the circumferential top surface and the circumferential bottom surface, wherein the moveable element is spaced apart from the substrate by the plurality of support elements, and the second ends of the plurality of support elements are opposite the respective first ends;
• and
• sensing a physical quantity by a deflection of the moveable element toward the substrate into a cavity defined by the substrate, the moveable element and the plurality of support elements.