Spectrometer with multiple Fabry-Perot filters for gas analysis
AssigneeSick AG
InventorsTorsten Waldmann, Rolf Disch
Life of this patent
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AssigneeSick AG
InventorsTorsten Waldmann, Rolf Disch
Estimating the term…
A spectrometer (10) for gas analysis is provided, the spectrometer comprising a measurement cell (28) having a gas to be investigated, a light source (12) for the transmission of light (14) into the measurement cell (28) on a light path (16), a filter arrangement (22) having a Fabry-Perot filter (24a-c) in the light path (16), in order to set frequency properties of the light (14) by means of a transmission spectrum of the filter arrangement (22), as well as a detector (36, 38) which measures the absorption of the light (14) by the gas (30) in the measurement cell (28). In this connection the filter arrangement (22) has a plurality of Fabry-Perot filters (24a-c) arranged behind one another in the light path (14) and a control unit (44) for the filter arrangement (22) is provided in order to change the transmission spectrum by setting at least one of the Fabry-Perot filters (24a-c).
A spectrometer for gas analysis, the spectrometer comprising:
A method of spectrometric gas analysis, comprising:
Dependencies are inferred from the claim text.