Capacitance type transducer and method of manufacturing the same

A method of manufacturing a capacitance type transducer comprising a plurality of cells each having a structure in which a vibrating film is supported so as to be vibrated, the vibrating film comprising:

• a second electrode formed so that a gap is interposed between the second electrode and a first electrode;
• and an insulating film formed on the second electrode,
• the method comprising:
• forming a sacrificial layer on the first electrode;
• forming a layer including the vibrating film on the sacrificial layer;
• forming an etching hole to remove the sacrificial layer;
• and
• forming a sealing film configured to seal the etching hole,
• the method further comprising, before the forming an etching hole to remove the sacrificial layer:
• forming a through hole in the insulating film on the second electrode;
• and
• forming a conductor film on the insulating film including the through hole to electrically connect a conductor in the through hole and the second electrode to each other,
• wherein the conductor film electrically connects second electrodes of the plurality of cells to each other.