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US 9,752,861 B2Granted
Flexible strain sensors
AssigneeBoard of Regents, The University of Texas System
InventorsUday Tata, Smitha Rao, Jung-Chih Chiao
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Abstract
In one embodiment, a flexible strain sensor includes a flexible substrate having a top surface and a layer of piezoresistive amorphous carbon formed on the top surface of the substrate.
Claims18
A flexible strain sensor comprising:
- a flexible polymeric substrate having a top surface;
- and
- a layer of amorphous carbon formed on the top surface of the substrate;
- wherein the sensor comprises a meandered active region formed by the substrate and the layer of amorphous carbon, the substrate and the layer of amorphous carbon both tracing a meandered line within the active region.
1 more element
An optical device comprising:
- a lens body;
- and
- a flexible strain sensor provided on the lens body, the sensor including a flexible polymeric substrate having a top surface and a layer of amorphous carbon formed on the top surface of the substrate, wherein the sensor comprises a meandered active region formed by the substrate and the layer of amorphous carbon, the substrate and the layer of amorphous carbon both tracing a meandered line within the active region.
Dependencies are inferred from the claim text.