Temperature adjustment apparatus

A temperature adjustment apparatus, which comprises:

• a stage on which a temperature adjustment object is placed, a heat exchange plate, and a thermoelectric module provided on a thermoelectric module plate, the thermoelectric module together with the thermoelectric module plate being arranged between the stage and the heat exchange plate, the thermoelectric module having a stage side facing the stage and a heal exchange plate side facing the heat exchange plate, wherein:
• the thermoelectric module includes a plurality of zones including an innermost zone having a circular shape and arranged closest to a center of the stage, and one or more outer zones that are ring-shaped and concentrically arranged with the innermost zone, the innermost zone and the one or more outer zones being configured to provide uninterrupted temperature adjustment, each zone including thermoelectric elements having one end face connected to a temperature adjustment side electrode being disposed on the stage side of the thermoelectric module and another end face connected to a heat exchange plate side electrode being disposed on the heat exchange plate side of the thermoelectric module, the temperature adjustment apparatus and the thermoelectric module are configured to perform temperature adjustment of the temperature adjustment object by passing an electric current to the heat exchange plate side electrode through at least one terminal provided in each zone of the plurality of zones formed from the center toward an outer side of the stage, the thermoelectric module being further configured to perform temperature adjustment independently in each zone of the plurality of zones from the center toward the outer side of the stage by passing the electric current through the one terminal of each zone, the one terminal of the innermost zone having an end provided with an electrode extension section connected to the heat exchange plate side electrode, the electrode extension section electrically connecting the thermoelectric elements in the innermost zone to the thermoelectric elements in another zone of the plurality of zones other than the innermost zone, the electrode extension section of the one terminal of the innermost zone is sandwiched between adjacent thermoelectric elements disposed in other zones of the plurality of zones, the electrode extension section being disposed at a position over which the temperature adjustment side electrodes are connected to the another end face of each of the adjacent thermoelectric elements, the one terminal and the electrode extension section are included in the thermoelectric module plate, and the one terminal of the innermost zone has another end disposed in an outer side region of the one or more outer zones and/or in a zone of the plurality of zones having the largest surface area.