Methods and apparatus to reduce shock in a slit valve door

A slit valve assembly, comprising:

• a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls;
• a slit valve door disposed within the housing and positionable between an open position clear of the substrate transfer port and a closed position sealing the at least one substrate transfer port;
• an actuator coupled to the slit valve door and operable to move the slit valve door between the open and closed positions;
• and
• a bumper assembly disposed on parallel edges of at least one face of the slit valve door, the bumper assembly comprising a plurality of first bumper members made of a first material and a plurality of second bumper members aligned with the first bumper members along a length of the parallel edges and made of a second material that is different than the first material, wherein each of the plurality of first bumper members project from the at least one face to a first distance and the plurality of second bumper members project from the at least one face to a second distance, the second distance being greater than the first distance.

A slit valve assembly, comprising:

• a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls;
• a slit valve door disposed within the housing and positionable between an open position clear of the substrate transfer port and a closed position sealing the at least one substrate transfer port;
• an actuator coupled to the slit valve door and operable to move the slit valve door between the open and closed positions;
• and
• a bumper assembly disposed on parallel edges of at least one face of the slit valve door, the bumper assembly comprising a plurality of first bumper members made of a first material and a plurality of second bumper members aligned with the first bumper members along a length of the parallel edges and made of a second material that is different than the first material, wherein each of the plurality of first bumper members alternate with each of the plurality of second bumper members.

A slit valve assembly, comprising:

• a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls;
• a slit valve door disposed within the housing and positionable between an open position clear of the at least one substrate transfer port and a closed position sealing the at least one substrate transfer port;
• and
• a plurality of first bumper members and a plurality of second bumper members disposed on an edge of at least one face of the slit valve door, one of the plurality of first bumper members and one of the plurality of second bumper members being aligned along a length of the slit valve door, wherein each of the plurality of first bumper members project from the at least one face to a first distance and each of the plurality of second bumper members project from the at least one face to a second distance, the second distance being greater than the first distance.

A slit valve assembly, comprising:

• a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls;
• a slit valve door disposed within the housing and positionable between an open position clear of the at least one substrate transfer port and a closed position sealing the at least one substrate transfer port;
• and
• a plurality of first bumper members and a plurality of second bumper members disposed on an edge of at least one face of the slit valve door, one of the plurality of first bumper members and one of the plurality of second bumper members being aligned along a length of the slit valve door, wherein each of the plurality of first bumper members alternate with each of the plurality of second bumper members along parallel sides of the face.

A slit valve assembly, comprising:

• a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls;
• a slit valve door disposed within the housing and positionable between an open position clear of the at least one substrate transfer port and a closed position sealing the at least one substrate transfer port;
• and
• a plurality of first bumper members and a plurality of second bumper members disposed on an edge of at least one face of the slit valve door, one of the plurality of first bumper members and one of the plurality of second bumper members being aligned along a length of the slit valve door, wherein each of the plurality of first bumper members comprise a material having a first hardness and each of the plurality of second bumper members comprise a material having a second hardness, wherein the first hardness is greater than the second hardness.