Arc evaporated Me11-aMe2aZI/Mo1-b-cSicBbZII multilayer coatings
AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorsHelmut Riedl, Mirjam Arndt, Peter Polcik, Paul Heinz Mayrhofer
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Abstract
A coating including a multilayer film, which includes a multi-layered structure including layers of the type I and layers of the type II. The layers of the type I are metal nitride with a chemical composition given by the formula Me11-aMe2aZI and the layers of the type II are a Mo-comprising material with chemical composition given by the formula Mo1-b-cSicBbZII or Mo1-b-cSicBb. Also described is a method for depositing the above mentioned coating.
Claims13
Coating comprising a multilayer film exhibiting a multilayered structure formed by a plurality N≧2 of layers type I and type II deposited alternated one on each other, characterized in that:
- the layers of type I consist of a metal nitride comprising material I having chemical composition Me11-aMe2aZI, and
- the layers of type II consist of a Mo comprising material II having chemical composition
- Mo1-b-cSicBbZII or Mo1-b-cSicBb,
- where:
- Me1 is one element selected from the groups IVB, VB, and VIIB of the periodic table of the elements excepting Mo,
- Me2 is one element selected from the group IIIA of the periodic table of the elements and Si,
- ZI is N or NO or NC or NCO,
- ZII is one or more elements selected from N, O and C,
- b and c are atomic concentration coefficients and 1−b−c>0, 0<b≦0.99, and 0<c≦0.99.
Dependencies are inferred from the claim text.