Piezoelectric device, liquid ejecting head and method for manufacturing piezoelectric device
AssigneeSeiko Epson Corporation
InventorsNaoya Sato, Shuichi Tanaka, Masashi Yoshiike, Naohiro Nakagawa
Life of this patent
Estimating the term…
Loading patent…
AssigneeSeiko Epson Corporation
InventorsNaoya Sato, Shuichi Tanaka, Masashi Yoshiike, Naohiro Nakagawa
Estimating the term…
A piezoelectric device includes a first substrate having a piezoelectric element on one surface thereof and a second substrate having penetration wiring that includes a through hole formed in a thickness direction thereof and a conductor section formed in the through hole. A resin section is formed on a surface of one substrate of one of the first substrate and the second substrate, which opposes the other substrate, and is formed of an elastic body in a shape protruding toward the other substrate, and a first electrode layer is formed on the surface of the other substrate side of the resin section. A second electrode layer is formed on a surface of the other substrate that opposes the one substrate, and the first substrate and the second substrate are joined in a state in which the first electrode layer and the second electrode layer are abutting against each other.
A piezoelectric device comprising:
Dependencies are inferred from the claim text.