Chromatic confocal device and method for 2D/3D inspection of an object such as a wafer

A method for inspecting the surface of an object comprising tridimensional structures, the method comprising:

• providing a chromatic lens with an extended axial chromatism;
• illuminating the object through the chromatic lens with a plurality of optical wavelengths being focused at different axial distances;
• collecting the light reflected by the object through the chromatic lens at a plurality of measurement points using a plurality of optical measurement channels with collection apertures;
• and
• measuring a total intensity of the light collected by at least one of the optical measurement channels for obtaining an intensity information at a measurement point;
• and
• providing, by scanning the surface of the object with an intensity detector, an intensity 2D image information of the surface, said intensity detector being implemented so as to image the surface of said object with a high lateral resolution over an extended depth of focus.