Switching circuit

A method of switching a circuit, the method comprising:

• providing a first switch comprising one or more transistors operably coupled in series with a first terminal, wherein each of the one or more transistors has a corresponding diode, a drain of each of the one or more transistors being operably coupled to a cathode of the corresponding diode;
• providing a second switch comprising one or more transistors operably coupled in series with a second terminal, wherein each of the one or more transistors has a corresponding diode, a drain of each of the one or more transistors being operably coupled to a cathode of the corresponding diode;
• operably coupling a source of the one or more transistors of the first switch to a source of the one or more transistors of the second switch;
• driving the first and second switches simultaneously ON;
• and
• driving the first and second switches simultaneously OFF.

A method of fabricating a semiconductor, the method comprising:

• placing a substrate in a plasma chamber configured to deposit a material layer onto the substrate or etch a material layer from the substrate;
• energizing plasma within the plasma chamber by coupling RF power from an RF source into the plasma chamber to perform a deposition or etching;
• and
• while energizing the plasma, carrying out an impedance match by an impedance matching network coupled between a load and an RF source, wherein the impedance matching network comprises:
• a first variable component providing a first variable capacitance or inductance;
• and
• a second variable component providing a second variable capacitance or inductance;
• and
• wherein each of the first variable component and the second variable component has a plurality of switching circuits configured to provide the first variable capacitance or inductance and the second variable capacitance or inductance, respectively, each of the plurality of switching circuits comprising:
• a first switch comprising one or more transistors operably coupled in series with a first terminal, wherein each of the one or more transistors has a corresponding diode, a drain of each of the one or more transistors being operably coupled to a cathode of the corresponding diode;
• and
• a second switch comprising one or more transistors operably coupled in series with a second terminal, wherein each of the one or more transistors has a corresponding diode, a drain of each of the one or more transistors being operably coupled to a cathode of the corresponding diode;
• wherein a source of the one or more transistors of the first switch is operably coupled to a source of the one or more transistors of the second switch.