Fluid sensor and method for examining a fluid
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V.
InventorIgnaz Eisele
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Abstract
Embodiments relate to a fluid sensor and a method for examining a fluid. A fluid sensor includes a substrate which comprises a recess for receiving a fluid to be examined, wherein the fluid sensor is implemented to detect electrical changes in the recess caused by the fluid to be examined.
Claims15
A fluid sensor comprising a substrate including a recess for receiving a fluid to be examined, the fluid sensor further comprising an exterior electrode, wherein the exterior electrode at least partially surrounds the recess and is connected or connectable to a reference potential, and a transistor implemented to detect electrical changes in the recess caused by the fluid to be examined as electrical potential changes in the recess,
- wherein the transistor is an insulated gate field effect transistor,
- wherein an insulated gate of the insulated gate field effect transistor is arranged at least partially in the recess,
- wherein the fluid sensor further comprises a chemically sensitive layer at least partially arranged in the recess,
- wherein the insulated gate is at least partially arranged between the chemically sensitive layer and the exterior electrode,
- wherein the insulated gate is at least partially separated from the chemically sensitive layer and the exterior electrode by at least one insulation layer.
A fluid sensor comprising a recess for receiving a fluid to be examined, and a transistor which is implemented to detect an electrical change caused by the fluid to be examined, wherein the transistor is an insulated gate field effect transistor and an insulated gate of the insulated gate field effect transistor and the recess are at least partially surrounded by a common shielding electrode,
- wherein the insulated gate of the insulated gate field effect transistor is arranged at least partially in the recess,
- wherein the fluid sensor further comprises a chemically sensitive layer at least partially arranged in the recess,
- wherein the insulated gate is at least partially arranged between the chemically sensitive layer and the common shielding electrode,
- wherein the insulated gate is at least partially separated from the chemically sensitive layer and the common shielding electrode by at least one insulation layer.
A method for examining a fluid, comprising:
- passing the fluid through a recess of a substrate, wherein the recess is at least partially surrounded by an exterior electrode;
- detecting an electrical change in the recess using a chemically sensitive layer at least partially arranged in the recess and a transistor which is configured to detect the electrical change as a change of an electrical potential in the recess, wherein the transistor is an insulated gate field effect transistor, wherein an insulated gate of the insulated gate field effect transistor is arranged at least partially in the recess, wherein the insulated gate is at least partially arranged between the chemically sensitive layer and the exterior electrode, wherein the insulated gate is at least partially separated from the chemically sensitive layer and the exterior electrode by at least one insulation layer;
- and
- at least partially shielding the transistor in the recess using a reference potential.
Dependencies are inferred from the claim text.