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US 9,543,184 B2Granted
Electrostatic chuck
AssigneeKYOCERA Corporation
InventorHiroshi Ono
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Abstract
The present invention is an electrostatic chuck including a ceramic base body and an adsorption electrode provided inside of or on the lower surface of the ceramic base body and having a portion where a Mn content is 1×10−4% by mass or less in a region from the upper surface of the ceramic base body to the adsorption electrode.
Claims6
An electrostatic chuck, comprising:
- a ceramic base body;
- and
- an adsorption electrode provided inside of or on a lower surface of the ceramic base body, wherein
- the electrostatic chuck has a portion where a manganese content is 1×10−4% by mass or less in a region from an upper surface of the ceramic base body to the adsorption electrode.
1 more element
Dependencies are inferred from the claim text.