Replaceable electrostatic chuck sidewall shield

A plasma apparatus comprising:

• a chamber;
• an electrostatic chuck positioned within the chamber, the electrostatic chuck comprising a base member attached to a top member by a bonding layer, the bonding layer and the top member having an interface;
• an epoxy contacting the base member and the top member, the epoxy comprising a material different from that of the bonding layer, the epoxy completely covering a periphery of the bonding layer between the base member and the top member;
• and
• a replaceable sidewall shield encircling a periphery of the electrostatic chuck and covering the epoxy, the replaceable sidewall shield being elastic, an exterior sidewall of the replaceable sidewall shield being exposed to an environment within the chamber, the exterior sidewall of the replaceable sidewall shield and the epoxy being on opposite sides of the replaceable sidewall shield;
• wherein a thickness of the bonding layer is less than a thickness of the epoxy in a direction perpendicular to the interface, and wherein the thickness of the epoxy is less than a thickness of the replaceable sidewall shield in the direction perpendicular to the interface.

An electrostatic chuck comprising:

• a base member having a first top surface;
• a top member on the base member;
• a bonding layer interposed between the base member and the top member;
• an epoxy contacting the base member and the top member, the epoxy comprising a material different from the bonding layer, the epoxy covering the bonding layer such that the bonding layer is not exposed;
• and
• a sidewall shield encircling a periphery of the epoxy, the sidewall shield being elastic and covering the epoxy, an exterior sidewall of the sidewall shield being exposed, the exterior sidewall of the sidewall shield and the epoxy being on opposite sides of the sidewall shield;
• wherein a thickness of the bonding layer is less than a thickness of the epoxy in a direction perpendicular to the first top surface, and wherein the thickness of the epoxy is less than a thickness of the sidewall shield in the direction perpendicular to the first top surface.