Apparatus for providing and directing heat energy in a process chamber

An apparatus for providing heat energy to a process chamber, the apparatus comprising:

• a process chamber body of the process chamber;
• a solid state source array having a plurality of solid state sources, disposed on a first substrate, to heat a target component disposed in the process chamber body;
• and
• at least one reflector disposed on the first substrate proximate to one or more of the plurality of solid state sources to direct heat energy provided by the one or more of the plurality of solid state sources towards the target component,
• wherein a reflective acrylic dam is disposed around a perimeter of the solid state source array and configured to contain an epoxy poured over each of the plurality of solid state sources and the at least one reflector.

An apparatus for providing heat energy to a process chamber, the apparatus comprising:

• a process chamber body of the process chamber;
• a solid state source array having a plurality of solid state sources disposed on a first substrate to heat a process chamber component disposed in the process chamber;
• a plurality of lateral reflectors mounted on the first substrate and substantially perpendicular to the first substrate, and arrayed substantially parallel to each other, each having a plurality of slots disposed along a first lateral edge;
• and
• a plurality of transverse reflectors mounted on the first substrate and substantially perpendicular to the first substrate, and arrayed substantially parallel to each other, each having a plurality of slots disposed along a first lateral edge,
• wherein the slots disposed along the first lateral edges of the plurality of transverse reflectors engage the slots disposed along the first lateral edges of the plurality of lateral reflectors to create a reflector array including at least one rectangular reflector cavity, and
• wherein each of the at least one rectangular reflector cavity is disposed about at least one of the plurality of solid state sources in the solid state source array to direct heat energy provided by at least one of the plurality of solid state sources towards the process chamber component.

An apparatus for providing heat energy to a process chamber, the apparatus comprising:

• a process chamber body of the process chamber;
• a solid state source array having a plurality of solid state sources, disposed on a first substrate, to heat a process chamber component disposed in the process chamber;
• at least one reflector disposed on the first substrate proximate to one or more of the plurality of solid state sources to direct heat energy provided by the one or more of the plurality of solid state sources towards the component;
• and
• at least one lens disposed between the solid state source array and the process chamber component to be heated, wherein each of the at least one lens directs heat energy provided by at least one of the plurality of solid state sources towards the process chamber component.