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US 9,521,795 B2Granted
Two-step direct bonding processes and tools for performing the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Li Hsiao, Da-Yuan Shih, Chih-Hang Tung, Chen-Hua Yu
Life of this patent
Estimating the term…
Abstract
A method includes placing a plurality of first package components over second package components, which are included in a third package component. First metal connectors in the first package components are aligned to respective second metal connectors of the second package components. After the plurality of first package components is placed, a metal-to-metal bonding is performed to bond the first metal connectors to the second metal connectors.
Claims20
A method comprising:
- placing a package component group over a bottom jig, wherein the package component group comprises a plurality of first package components, with neighboring ones of the plurality of first package components contact with each other to form the package component group;
- placing a plurality of second package components over the plurality of first package components, wherein the plurality of first package components and the plurality of second package components in combination form a modified package component group, wherein first metal connectors in the plurality of first package components are aligned to respective second metal connectors of the plurality of second package components;
- placing a top jig over the plurality of first package components;
- securing the bottom jig, the top jig, and the modified package component group using a clamp to form an integrated jig assembly;
- stacking a plurality of weight units over the plurality of second package components, wherein the plurality of weight unit comprises:
- a first weight unit having a first weight;
- and
- a second weight unit having a second weight different from the first weight unit;
- and
- performing a metal-to-metal bonding on the integrated jig assembly to bond the first metal connectors to the second metal connectors, wherein each of the plurality of weight units applies a weight on respective underlying ones of the plurality of second package components individually during the metal-to-metal bonding.
7 more elements
A method comprising:
- placing a plurality of first package components over a plurality of second package components, wherein the plurality of second package components in combination form a third package component, and neighboring ones of the plurality of second package components contact with each other, wherein first metal connectors in the first package components are aligned to respective second metal connectors of the a plurality of second package components;
- placing a top jig over the plurality of first package components, wherein the top jig comprises a plurality of landing units, each comprising an elastic coating, and wherein each of the plurality of landing units is configured to tilt in response to tilted top surfaces of the respective underlying ones of the plurality of first package components;
- stacking a plurality of weight units over the plurality of landing units;
- and
- performing a metal-to-metal bonding to bond the first metal connectors to the second metal connectors, wherein each of the plurality of weight units applies a weight on a respective underlying one of the plurality of first package components individually during the metal-to-metal bonding.
2 more elements
A method comprising:
- placing a package component group over a bottom jig, wherein the package component group comprises a plurality of first package components, with neighboring ones of the plurality of first package components contact with each other to form the package component group;
- placing a plurality of second package components over the plurality of first package components, wherein the plurality of first package components and the plurality of second package components in combination form a modified package component group, wherein first metal connectors in the plurality of first package components are aligned to respective second metal connectors of the plurality of second package components;
- placing a top jig over the plurality of first package components, wherein the top jig comprises landing units having elastic outer portions, and wherein the landing units are configured to tilt in response to tilted top surfaces of the respective underlying ones of the plurality of second package components;
- securing the bottom jig, the top jig, and the modified package component group using a clamp to form an integrated jig assembly;
- stacking a plurality of weight units over the plurality of second package components, wherein the plurality of weight unit comprises:
- a first weight unit having a first weight;
- and
- a second weight unit having a second weight different from the first weight unit;
- and
- performing a metal-to-metal bonding on the integrated jig assembly to bond the first metal connectors to the second metal connectors, wherein each of the plurality of weight units applies a weight on respective underlying ones of the plurality of second package components individually during the metal-to-metal bonding.
7 more elements
Dependencies are inferred from the claim text.