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US 9,521,759 B2Granted
Vertical conductive unit and manufacturing method thereof
AssigneeMicrocosm Technology Co., Ltd.
InventorTang-Chieh Huang
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Abstract
The invention provides a vertical conductive unit. The vertical conductive unit comprises an insulating layer comprising a connecting via, a first conductor, a second conductor, and a third conductor. The insulating layer comprises photosensitive polyimide, and the glass transition temperature of the photosensitive polyimide is lower than about 200° C. The invention also provides a method for manufacturing the vertical conductive unit.
Claims12
A vertical conductive unit, which comprises:
- an insulating layer comprising an upper surface and a lower surface, and the insulating layer comprising a connecting via running through the insulating layer;
- a first conductor contacting the lower surface of the insulating layer;
- a second conductor contacting the upper surface of the insulating layer;
- and
- a third conductor located in the connecting via and contacting the first conductor and the second conductor;
- wherein the insulating layer comprises photosensitive polyimide, and a glass transition temperature of the photosensitive polyimide is lower than about 200° C. and
- wherein the photosensitive polyimide is copolymerized by a unit represented by formula (1) and a unit represented by formula (2),
- wherein:
- R1 is selected from the group consisting of formulae (3) to (8);
- R2 is selected from the group consisting of formulae (9) to (14);
- R* represents
- R3 represents and
- x represents an integer from 1 to 20.
10 more elements
A vertical conductive unit, which comprises:
- an insulating layer comprising an upper surface and a lower surface, and the insulating layer comprising a connecting via running through the insulating layer;
- a first conductor contacting the lower surface of the insulating layer;
- a second conductor contacting the upper surface of the insulating layer;
- and
- a third conductor located in the connecting via and contacting the first conductor and the second conductor;
- wherein the insulating layer comprises photosensitive polyimide, and a glass transition temperature of the photosensitive polyimide is lower than about 200° C., and
- wherein the photosensitive polyimide is copolymerized by a unit represented by formula (15),
- wherein:
- R4 represents
- and
- R5 is selected from the group consisting of formulae (16) to (22);
8 more elements
Dependencies are inferred from the claim text.