Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded

A pattern measuring apparatus that scans a sample with charged particles, forms a detected image by detecting secondary charged particles or backscattered charged particles generated from the sample, and measures a pattern imaged on the detected image, the apparatus comprising:

• an image acquiring section acquiring a plurality of detected images taken at a substantially same location on the sample under different detecting conditions;
• a contour extracting section extracting a plurality of pattern contours from the plurality of detected images;
• a contour reconstructing section reconstructing a contour to be measured by combining the plurality of pattern contours;
• a contour measuring section making a measurement using the reconstructed contour to be measured;
• and
• an interface simultaneously displaying pattern contours extracted from a plurality of detected images acquired at the substantially same location on the sample, wherein the interface has a contour extracting method setting section.

A pattern measuring method of scanning a sample with charged particles, forming a detected image by detecting secondary charged particles or backscattered charged particles generated from the sample, and measuring a pattern imaged on the detected image, the method comprising the steps of:

• acquiring a plurality of detected images taken at a substantially same location on the sample under different imaging conditions;
• extracting a plurality of pattern contours from the plurality of detected images;
• reconstructing a contour to be measured by combining the plurality of pattern contours;
• making a measurement using the reconstructed contour to be measured;
• and
• simultaneously displaying, using an interface having a contour extracting method setting section, pattern contours extracted from a plurality of detected images acquired at the substantially same location on the sample.

A pattern measuring method of scanning a sample with charged particles, forming a detected image by detecting secondary charged particles or backscattered charged particles generated from the sample, and measuring a pattern imaged on the detected image, the method including the steps of:

• acquiring a plurality of detected images taken at a substantially same location on the sample under different detecting conditions;
• extracting a plurality of pattern contours from the plurality of detected images;
• reconstructing a contour to be measured by combining the plurality of pattern contours;
• making a measurement using the reconstructed contour to be measured;
• and
• simultaneously displaying, using an interface having a contour extracting method setting section, pattern contours extracted from a plurality of detected images acquired at the substantially same location on the sample.

A non-transitory computer-readable recording medium on which a pattern measuring program for causing a computer to execute a measurement of a pattern imaged on a detected image acquired by a charged particle beam device is recorded, the program causes the computer to:

• read a plurality of detected images taken at a substantially same location on the sample under different imaging conditions;
• extract a plurality of pattern contours from the plurality of detected images;
• reconstruct a contour to be measured by combining the plurality of pattern contours;
• make a measurement using the reconstructed contour to be measured;
• and
• simultaneously display, using an interface having a contour extracting method setting section, pattern contours extracted from a plurality of detected images acquired at the substantially same location on the sample.