Elastic wave device including a conductive shield electrode and manufacturing method thereof
AssigneeMurata Manufacturing Co., Ltd.
InventorKenji Inate
Life of this patent
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Abstract
In an elastic wave device, a first electrode structure and a second electrode structure are provided on a piezoelectric substrate. The first electrode structure and the second electrode structure define first and second elastic wave element portions, respectively. A support frame on the piezoelectric substrate surrounds the first elastic wave element portion and the second elastic wave element portion. The support frame includes a dividing wall portion that divides the first elastic wave element portion and the second elastic wave element portion. A conductive shield electrode is provided in a groove provided in the dividing wall portion.
Claims19
An elastic wave device comprising:
- a piezoelectric substrate;
- a first electrode structure provided on the piezoelectric substrate, and defining a first elastic wave element portion;
- a second electrode structure provided on the piezoelectric substrate, and defining a second elastic wave element portion;
- a support frame provided on the piezoelectric substrate to surround a portion including the first elastic wave element portion and the second elastic wave element portion;
- and
- a cover layer provided on the support frame, and defining first and second hollow portions faced by the first and second elastic wave element portions;
- wherein
- the support frame includes a dividing wall portion that divides the first elastic wave element portion and the second elastic wave element portion, and a conductive shield electrode provided in a groove in the dividing wall portion.
Dependencies are inferred from the claim text.