Thin film battery having improved battery performance through substrate surface treatment and method for manufacturing same
AssigneeApplied Materials, Inc.
InventorsYoung Jin Yoon, Jae Hwan Ko
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AssigneeApplied Materials, Inc.
InventorsYoung Jin Yoon, Jae Hwan Ko
Estimating the term…
Disclosed are a thin film battery in which a negative electrode active material and a substrate side react with each other to prevent battery performance from deteriorating, and to a method for manufacturing same. The thin film battery according to the present invention has a structure in which a negative electrode active material contacts a substrate. Here, a first surface treatment layer containing the negative electrode active material and a non-reactive material are disposed on at least the portion where the negative electrode active material contacts the surface of the substrate.
A thin film battery comprising:
A thin film battery comprising:
A method of manufacturing a thin film battery, comprising:
Dependencies are inferred from the claim text.