Ultraviolet light emitting device separated from growth substrate and method of fabricating the same

Abstract

A UV light emitting device and a method for fabricating the same are disclosed. The method includes forming a first super-lattice layer including AlxGa(1-x)N on a substrate, forming a sacrificial layer including AlzGa(1-z)N on the first super-lattice layer, partially removing the sacrificial layer, forming an epitaxial layer on the sacrificial layer, and separating the substrate from the epitaxial layer, wherein the sacrificial layer includes voids, the substrate is separated from the epitaxial layer at the sacrificial layer, and forming an epitaxial layer includes forming an n-type semiconductor layer including n-type AluGa(1-u)N (0<u≦z≦x<1). With this structure, the light emitting device can emit UV light and be separated from the substrate.

Dependencies are inferred from the claim text.