Embedded optical sensors using transverse Fabry-Perot resonator as detectors

A multi-cell detection unit to detect a normally incident light of a wavelength range, the multi-cell detection unit comprising:

• a plurality of optical light sensors, each optical light sensor being configured to generate a signal in response to detecting light of the wavelength range having an incidence plane normal to the optical light sensor and parallel to a lengthwise direction of a cavity of the optical light sensor, each optical light sensor comprising:
• a transistor integrated with a detector, comprising:
• a substrate;
• a plurality of dielectric structures on the substrate;
• an electrode of the transistor on a dielectric structure of the plurality of dielectric structures, to block light of the wavelength range from reaching the dielectric structure, other ones of the plurality of dielectric structures being configured to receive light through a side of the dielectric structure opposite to the substrate;
• a plurality of conductive structures on the substrate, consecutive conductive structures of the plurality of conductive structures having a corresponding dielectric structure of the plurality of dielectric structures therebetween, first ones of the plurality of conductive structures being coupled together, second ones of the plurality of conductive structures being coupled together, and the first and second ones of the plurality of conductive structures being alternately arranged;
• and
• a transparent insulation layer on the plurality of dielectric structures and the plurality of conductive structures,
• wherein the consecutive conductive structures and the corresponding dielectric structure form the cavity to induce an absorption resonance in response to receiving the light of the wavelength range,
• wherein lengthwise directions of cavities of a first and second optical light sensors of the plurality of optical light sensors are at an angle to one another.

An optical light sensor to detect a light of a wavelength range, the optical light sensor comprising:

• a transistor integrated with a detector, comprising:
• a plurality of p-type semiconductors and a plurality of n-type semiconductors alternately arranged in a transverse direction;
• a plurality of intrinsic semiconductors, each intrinsic semiconductor between a corresponding one of the p-type semiconductors and a corresponding one of the n-type semiconductors;
• a plurality of electrodes on the plurality of p-type and n-type semiconductors, and forming a plurality of cavities with corresponding ones of the plurality of intrinsic semiconductors therebetwee;
• a transparent insulation layer on the plurality of intrinsic semiconductors and the plurality of electrodes;
• and
• a gate electrode of the transistor on a first cavity of the plurality of cavities, to block light of the wavelength range from reaching the cavity,
• wherein first ones of the plurality of electrodes on the plurality of p-type semiconductors are coupled together, and second ones of the plurality of electrodes on the plurality of n-type semiconductors are coupled together, the first and second plurality of electrodes being alternately arranged,
• wherein a second cavity of the plurality of cavities is exposed to incident light in a longitudinal direction and is configured to induce an absorption resonance in response to received light of the wavelength range.

An optical sensing array to detect a light of a wavelength range, the optical sensing array comprising:

• a plurality of row conductors;
• a plurality of column conductors crossing the row conductors;
• a plurality of optical light sensors coupled to the plurality of row and column conductors, each one of the plurality of optical light sensors comprising:
• a transistor integrated with a detector, comprising:
• a plurality of p-type semiconductors and a plurality of n-type semiconductors alternately arranged in a transverse direction;
• a plurality of intrinsic semiconductors, each intrinsic semiconductor between a corresponding one of the p-type semiconductors and a corresponding one of the n-type semiconductors;
• a plurality of electrodes on the plurality of p-type and n-type semiconductors, and forming a plurality of cavities with corresponding ones of the plurality of intrinsic semiconductors therebetween;
• and
• a gate electrode of the transistor on a first cavity of the plurality of cavities, to block light of the wavelength range from reaching the cavity, the gate electrode being coupled to one of the plurality of column conductors;
• wherein first ones of the plurality of electrodes on the plurality of p-type semiconductors are coupled together, and second ones of the plurality of electrodes on the plurality of n-type semiconductors are coupled together, the first and second plurality of electrodes being alternately arranged,
• wherein a second cavity of the plurality of cavities is configured to be exposed to incident light in a longitudinal direction and is configured to induce an absorption resonance in response to received light of the wavelength range.

An optical light sensor to detect a light of a wavelength range, the optical light sensor comprising:

• a transistor integrated with a detector, comprising:
• a plurality of p-type semiconductors and a plurality of n-type semiconductors alternately arranged in a transverse direction;
• a plurality of intrinsic semiconductors, each intrinsic semiconductor between a corresponding one of the p-type semiconductors and a corresponding one of the n-type semiconductors;
• a plurality of electrodes on the plurality of p-type and n-type semiconductors, and forming a plurality of cavities with corresponding ones of the plurality of intrinsic semiconductors therebetween;
• a transparent insulation layer on the plurality of intrinsic semiconductors and the plurality of electrodes;
• and
• a gate electrode of the transistor on a first cavity of the plurality of cavities, to block light of the wavelength range from reaching the cavity,
• wherein first ones of the plurality of electrodes on the plurality of p-type semiconductors are coupled together, and second ones of the plurality of electrodes on the plurality of n-type semiconductors are coupled together, the first and second plurality of electrodes being alternately arranged,
• wherein a second cavity of the plurality of cavities is configured to induce an absorption resonance in response to received light of the wavelength range.