3D independent double gate flash memory on bounded conductor layer
AssigneeMacronix International Co., Ltd.
InventorHang-Ting Lue
Life of this patent
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AssigneeMacronix International Co., Ltd.
InventorHang-Ting Lue
Estimating the term…
A memory device configurable for independent double gate cells, storing multiple bits per cell, includes multilayer stacks of conductive strips configured as word lines. Active pillars are disposed between pairs of first and second stacks, each active pillar comprising a vertical channel structure extending from an underlying bounded conductive layer, a charge storage layer and an insulating layer. The insulating layer in a frustum of an active pillar contacts a first arcuate edge of a first conductive strip in a layer of the first stack and a second arcuate edge of a second conductive strip in a same layer of the second stack. The conductive strips can comprise a metal. The active pillar can be generally elliptical with a major axis parallel with the first and second conductive strips.
A memory device, comprising:
A memory device, comprising:
Dependencies are inferred from the claim text.