Self-aligned isolation structures and light filters
AssigneeOmniVision Technologies, Inc.
InventorsWei Zheng, Chia-Ying Liu, Chun-Yung Ai, Wu-Zang Yang, Chih-Wei Hsiung, Chen-Wei Lu
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AssigneeOmniVision Technologies, Inc.
InventorsWei Zheng, Chia-Ying Liu, Chun-Yung Ai, Wu-Zang Yang, Chih-Wei Hsiung, Chen-Wei Lu
Estimating the term…
An image sensor includes a semiconductor layer with a plurality of photodiodes. A plurality of isolation structures is disposed in the back side of the semiconductor layer between individual photodiodes in the plurality of photodiodes. The plurality of isolation structures extend into the back side of the semiconductor layer a first depth and extend out of the back side of the semiconductor layer a first length. A plurality of light filters is disposed proximate to the back side of the semiconductor layer such that the plurality of isolation structures is disposed between individual light filters in the plurality of light filters. An antireflection coating is also disposed between the semiconductor layer and the plurality of light filters.
An image sensor, the image sensor comprising:
An imaging system, the imaging system comprising:
A method of image sensor fabrication, the method comprising:
Dependencies are inferred from the claim text.