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US 9,520,418 B2Granted
Active array substrate and manufacturing method thereof
AssigneeAu Optronics Corporation
InventorsTsung-Ying Ke, Pin-Fan Wang, Tsi-Hsuan Hsu, Wei-Te Lee
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Abstract
An active array substrate includes a flexible substrate, an inorganic barrier layer, and at least one active component. The inorganic barrier layer covers the flexible substrate. The inorganic barrier layer has a through hole therein. The through hole of the inorganic barrier layer exposes the flexible substrate. The active component is disposed on the inorganic barrier layer.
Claims6
A manufacturing method of an active array substrate comprising:
- forming a flexible substrate on a carrier with a photosensitive stripping layer therebetween;
- forming an inorganic barrier layer to cover the flexible substrate;
- forming at least one active component on the inorganic barrier layer;
- forming a through hole in the inorganic barrier layer to expose the flexible substrate;
- irradiating the photosensitive stripping layer with a light source;
- and
- stripping the photosensitive stripping layer from the carrier.
4 more elements
Dependencies are inferred from the claim text.