System and method for moving workpieces between multiple vacuum environments

A method for moving workpieces between a first pressure environment and a second pressure environment, the method comprising:

• providing a first vacuum enclosure coupled to a second vacuum enclosure, the first vacuum enclosure having a first vacuum pressure level and the second vacuum enclosure having a second vacuum pressure level;
• performing a first process on a workpiece in the first vacuum enclosure, the workpiece retained in a first process position by a workpiece holder of a transfer carrier;
• moving the transfer carrier between the first process position within the first vacuum enclosure to a second process position in which the workpiece holder abuts an access port connecting the first vacuum enclosure and the second vacuum enclosure, wherein the workpiece holder is disposed entirely within the first vacuum enclosure in the first process position and in the second process position, and wherein the workpiece is disposed only within the access port when the transfer carrier is the second process position;
• creating a seal around the access port;
• opening the access port to expose the workpiece to an interior of the second vacuum enclosure;
• and
• performing a second process on the workpiece in the second vacuum enclosure.