Methods and systems for plasma deposition and treatment

An apparatus for separating ions having different mass or charge, comprising:

• a waveguide conduit having a plurality of openings at one side thereof and a plurality of slots at an opposite side thereof, each of said slots corresponding to one or more openings, said waveguide conduit being coupled to a microwave source for transmitting microwaves from the microwave source through the waveguide conduit and enabling the microwaves to exit through the plurality of slots;
• a plurality of pipes, one or more of which extends into the waveguide conduit through each of the plurality of openings in the waveguide conduit, each of said pipes having an outlet end positioned at a slot corresponding to the opening through which said pipe extends for transporting material from one or more material sources to the plurality of slots, wherein a gap exists between the outlet end of each pipe and a slot at which it is positioned;
• a plasma chamber in communication with the waveguide tube through the plurality of slots, said plasma chamber receiving through said plurality of slots microwaves from the waveguide tube through said gaps and material to be melted or evaporated from the pipes, said plasma chamber including a plurality of magnets disposed in an outer wall of the plasma chamber for forming a magnetic field in the plasma chamber to enable formation of a plurality of plasma regions therein, said plasma chamber further comprising a charged cover at a side of the chamber opposite the side containing the plurality of slots, said cover including extraction holes through which ion beams from the plasma chamber are extracted;
• and
• a plurality of deflectors, each coupled to one of the extraction holes for receiving the ion beams extracted from the plasma chamber, each deflector bending an ion beam enabling ions to follow different trajectories based on their respective mass or charge.