US 9,520,259 B2 · Ion beam uniformity control

Abstract

A plasma chamber having improved controllability of the ion density of the extracted ribbon ion beam is disclosed. A plurality of pairs of RF biased electrodes is disposed on opposite sides of the extraction aperture in a plasma chamber. In some embodiments, one of each pair of RF biased electrodes is biased at the extraction voltage, while the other of each pair is coupled to a RF bias power supply, which provides a RF voltage having a DC component and an AC component. In another embodiment, both of the electrodes in each pair are coupled to a RF biased power supply. A blocker may be disposed in the plasma chamber near the extraction aperture. In some embodiments, RF biased electrodes are disposed on the blocker.

Claims17

Dependent claims

A plasma chamber, comprising:

a power source to generate a plasma within the plasma chamber;
a chamber wall having an extraction aperture through which ions from the plasma are extracted, the chamber wall biased at an extraction voltage;
a blocker disposed within the plasma chamber proximate the extraction aperture, biased at the extraction voltage;
an RF biased electrode disposed on the blocker;
and
an RF bias power supply to supply a RF voltage to the RF biased electrode.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

14/949,468Filed 23 Nov 2015 · division

Priority

16 Oct 2014

Published

US 2016/0111241 A121 Apr 2016

Granted

13 Dec 2016

Term ends

Not estimatedThe source records don’t support an estimate.

Classification8 codes

H01J 27/024
Details: extraction optics, e.g. grids
H01J 37/08
Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical…:…
H01J 27/16
Ion sources; Ion guns: using high-frequency excitation, e.g. microwave excitation
H01J 2237/0815
Ion sources: methods of ionisation

Ion beam uniformity control

Life of this patent

Ion beam uniformity control

Life of this patent

Abstract

Claims17