Cold stripper for high energy ion implanter with tandem accelerator
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorShengwu Chang
Life of this patent
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Abstract
A cold stripper for a high-energy ion implanter system is provided. The cold stripper including a stripper tube having a hollow cavity, a first aperture in the stripper tube to admit an ion beam of positively charged ions into the hollow cavity and a second aperture in the stripper tube to discharge the ion beam from the hollow cavity, a gas pump coupled to the hollow cavity to introduce a gas into the hollow cavity, one or more cooling passages in the stripper tube, and a coolant pump coupled to the one or more cooling passages to circulate a coolant through the one or more cooling passages.
Claims19
A cold stripper to strip electrons from ions in an ion beam comprising:
- a stripper tube having a hollow cavity;
- the stripper tube further comprising:
- a first aperture to admit an ion beam having negatively charged ions into the hollow cavity, a second aperture in the stripper tube to discharge the ion beam having positively charged ions from the hollow cavity, and a wall containing a coolant passage, the coolant passage disposed outside of the hollow cavity;
- a gas pump coupled to the hollow cavity to introduce a gas into the hollow cavity;
- a coolant passage in the stripper tube and disposed outside of the hollow cavity;
- and
- a coolant pump coupled to the cooling passage to circulate a coolant through the cooling passage.
A tandem accelerator used to accelerate ions in an ion beam comprising:
- a low-energy accelerator tube
- a high-energy accelerator tube;
- and
- a cold stripper disposed between the low-energy accelerator tube and the high-energy accelerator tube, the cold stripper comprising:
- a stripper tube including a hollow cavity;
- the stripper tube further comprising a first aperture to admit an ion beam having negatively charged ions into the hollow cavity, a second aperture to discharge the ion beam having positively charged ions from the hollow cavity, and a wall containing coolant passage, the coolant passage disposed outside of the hollow cavity;
- a gas pump coupled to the hollow cavity to introduce a gas into the hollow cavity;
- a cooling passage disposed in the stripper tube and disposed outside of the hollow cavity;
- and
- a coolant pump coupled to the cooling passage to circulate a coolant therethrough.
A method of generating a high-energy ion beam comprising:
- admitting an ion beam into a hollow cavity in a stripper tube, wherein the stripper tube comprises a wall containing one or more coolant passages, the one or more coolant passages disposed around the hollow cavity and outside of the hollow cavity;
- introducing a gas into the hollow cavity;
- cooling the stripper tube;
- measuring a pressure in the hollow cavity;
- and
- adjusting a rate of the cooling to maintain the pressure in the hollow cavity between a range of pressures.
Dependencies are inferred from the claim text.