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US 9,520,151 B2Granted
Multiple layer FePt structure
AssigneeSeagate Technology LLC
InventorsJiaoming Qui, Yonghua Chen, Ganping Ju, Thomas P. Nolan
Life of this patent
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Abstract
A method involves depositing a seed layer comprising at least A1 phase FePt. A main layer of A1 phase FePt is deposited over the seed layer. The main layer includes FePt of a different stoichiometry than the seed layer. The seed and main layers are annealed to convert the A1 phase FePt to L10 phase FePt. The annealing involves heating the substrate prior to depositing at least part of the A1 phase FePt of the main or seed layers.
Claims17
A method comprising:
- depositing a seed layer comprising at least A1 phase FePt;
- depositing a main layer of A1 phase FePt on the seed layer, wherein the main layer comprises FePt of a different stoichiometry than the seed layer;
- and
- annealing the seed and main layers to convert the A1 phase FePt to L10 phase FePt, the annealing step comprising heating the substrate prior to depositing at least part of the A1 phase FePt of the main or seed layers, the main and seed layer forming a graded FePt structure of varying stoichiometry responsive to said annealing.
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A method comprising:
- depositing a main layer comprising at least A1 phase FePt, the main layer having a Fe:Pt ratio approximately equal to 1;
- depositing a cap layer of A1 phase FePt on the main layer having a different stoichiometry than the main layer and a Fe:Pt ratio greater than or less than 1;
- and
- annealing the main and cap layers to convert the A1 phase FePt to L10 phase FePt, the annealing comprising heating the substrate prior to depositing at least part of the A1 phase FePt of the main layer or the cap layer.
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A method comprising:
- depositing a seed layer comprising at least A1 phase FePt;
- depositing a main layer of A1 phase FePt on the seed layer, the main layer comprising FePt of a different stoichiometry than the seed layer;
- depositing a cap layer comprising A1 phase FePt and Cu on the main layer;
- and
- annealing the seed and main layers to convert the A1 phase FePt to L10 phase FePt, the annealing step comprising heating the substrate prior to depositing at least part of the A1 phase FePt of the main or seed layers, after the annealing step the main layer and cap layer forming a graded FePtCu composition.
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Dependencies are inferred from the claim text.