Magnetic device and lithographic apparatus
AssigneeASML Netherlands B.V.
InventorsFidelus Adrianus Boon, Olof Martinus Josephus Fischer
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AssigneeASML Netherlands B.V.
InventorsFidelus Adrianus Boon, Olof Martinus Josephus Fischer
Estimating the term…
A magnetic device includes first and second parts, a first magnetic part, with a first magnetic polarization, coupled to the first part, a second magnetic part, with a second magnetic polarization, coupled to the second part and an additional magnetic part coupled to the first part and having an additional magnetic polarization. The first and second magnetic parts magnetically interact with each other. The first magnetic part exerts a first force on the second magnetic part, the second magnetic part exerts a second force on the first magnetic part and the first and second forces have opposite directions that are parallel to a reference direction. The first magnetic polarization is substantially parallel to the reference direction, the second magnetic polarization is substantially perpendicular to the reference direction, the additional magnetic polarization makes an angle with the first magnetic polarization and has a magnitude in a range of about 90°-270°.
A magnetic device, comprising:
Dependencies are inferred from the claim text.