Substrate holding apparatus and method
AssigneeSamsung Display Co., Ltd.
InventorSung Hune Yoo
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Abstract
Provided are a substrate holding apparatus and a method of using the substrate holding apparatus. According to an aspect of the present invention, there is provided a substrate holding apparatus comprising a stage on which a substrate is placed, and at least one lift bar which separates the substrate from the stage by raising the substrate or placing the substrate on the stage by lowering the substrate. The lift bar comprises a body and a head. The head is connected to an end of the body, contacts the substrate, and is formed of a porous material.
Claims20
A substrate holding apparatus, comprising:
- a stage having a major surface disposed to receive a substrate;
- and
- at least one lift bar coupled to the stage and configured to move the substrate relative to the major surface of the stage, the lift bar comprising:
- a body;
- and
- a head connected to an end of the body to contact the substrate and formed of a porous material.
A substrate holding apparatus, comprising:
- a stage having a major surface disposed to support a substrate;
- and
- at least one lift bar coupled to the stage and configured to move the substrate towards and away from the major surface of the stage, the lift bar comprising:
- a body;
- and
- a head connected to an end of the body to control the substrate, the stage and the head formed of a same material, wherein each of the head and the stage being absent of a through hole.
A method for using a substrate holding apparatus, the method comprising:
- raising a lift bar with respect to a major surface of a stage;
- placing a substrate on a head of the lift bar, the head formed of a porous material and being absent of any through holes;
- and
- lowering the lift bar with respect to the major surface of the stage.
Dependencies are inferred from the claim text.