Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, pattern forming method, process for manufacturing electronic device and electronic device
AssigneeFUJIFILM Corporation
InventorFumihiro Yoshino
Life of this patent
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Abstract
An actinic-ray- or radiation-sensitive resin composition includes a compound (A) that is configured to produce an acid when exposed to actinic rays or radiation, and a resin (B). The compound (A) is expressed by general formula (1) or (2) below. The resin (B) contains a repeating unit (b) containing a group that is configured to decompose when acted on by an acid to thereby produce an alcoholic hydroxyl group.
Claims14
An actinic-ray- or radiation-sensitive resin composition comprising a compound (A) that is configured to produce an acid when exposed to actinic rays or radiation, the compound expressed by general formula (1) or (2) below, and a resin (B) containing a repeating unit (b) containing a group that is configured to decompose when acted on by an acid to thereby produce an alcoholic hydroxyl group,
- in general formula (1),
- R1A represents a linear, branched-chain or cyclic organic group;
- each of R2A and R3A independently represents a hydrogen atom, a methyl group or CF3;
- R4A represents a hydrogen atom, a hydroxyl group, a linear or branched-chain alkyl group, a cycloalkyl group, a linear, branched-chain or cyclic alkyloxy group or any of groups of general formula (1a) below, provided that a fluorine atom may be contained in each of the alkyl group and the alkyloxy group;
- and
- XA represents an alkylene chain in which a heteroatom may be contained, the alkylene chain constructing a ring in cooperation with the S atom in the formula, and
- in general formula (2),
- R1B represents a linear, branched-chain or cyclic organic group;
- R4B represents a hydrogen atom, a hydroxyl group, a linear or branched-chain alkyl group, a cycloalkyl group, a linear, branched-chain or cyclic alkyloxy group or any of groups of general formula (1a) below, provided that a fluorine atom may be contained in each of the alkyl group and the alkyloxy group;
- XB represents an alkylene chain in which a heteroatom may be contained, the alkylene chain constructing a ring in cooperation with the S atom in the formula;
- and
- nB is 0 or 1,
- in general formula (1a),
- n is an integer of 1 or greater;
- and
- * represents a site of bonding to the naphthyl group in general formula (1) or (2).
Dependencies are inferred from the claim text.