US 9,519,136 B2 · Device and method for micro-electro-mechanical-system photonic switch

Abstract

In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators including a first collimator configured to receive a first traffic optical beam having a traffic wavelength and a first control optical beam having a control wavelength, where a first focal length of the first collimators at the traffic wavelength is different than a second focal length of the first collimators at the control wavelength. The MEMS photonic switch also includes a first mirror array optically coupled to the first plurality of collimators, where the first mirror array including a first plurality of first MEMS mirrors integrated on a first substrate and a first plurality of first photodiodes integrated on the first substrate, where the photodiodes are disposed in interstitial spaces between the MEMS mirrors.

Claims26

Dependent claims

A micro-electro-mechanical-system (MEMS) photonic switch comprising:

a first plurality of collimators comprising a first collimator configured to receive a first traffic optical beam having a traffic wavelength and a first control optical beam having a control wavelength, wherein a first focal length of the first plurality of collimators at the traffic wavelength is different than a second focal length of the first plurality of collimators at the control wavelength;
and
a first mirror array optically coupled to the first plurality of collimators, wherein the first mirror array comprises:
a first plurality of MEMS mirrors integrated on a first substrate, and
a first plurality of photodiodes integrated on the first substrate, wherein the first plurality of photodiodes are disposed in interstitial spaces between the first plurality of MEMS mirrors.

2 more elements

A control system comprising:

a first inject optical signal module configured to inject a first control optical signal into a first collimator of a first plurality of collimators of a micro-electro-mechanical system (MEMS) photonic switch to reflect off a first mirror to form a first beam spot on a first MEMS mirror array;
a mirror acquisition control unit configured to be coupled to the MEMS photonic switch, wherein the mirror acquisition control unit is configured to receive a first plurality of signals from a first plurality of interstitial photodiodes associated with the first mirror, wherein the first plurality of interstitial photodiodes has a first plurality of locations, wherein the mirror acquisition control unit is configured to detect the first beam spot when the first beam spot is centered on the first mirror, wherein a first focal length of the first plurality of collimators at a traffic wavelength is different than a second focal length of the first plurality of collimators at a control wavelength;
and
a mirror driver coupled to the mirror acquisition control unit, wherein the mirror driver is configured to be coupled to the MEMS photonic switch, and wherein the mirror driver is configured to control a second mirror of a second MEMS mirror array of the MEMS photonic switch in accordance with the first plurality of signals and the first plurality of locations.

1 more element

Dependencies are inferred from the claim text.

Device and method for micro-electro-mechanical-system photonic switch

Life of this patent

Device and method for micro-electro-mechanical-system photonic switch

Life of this patent

Abstract

Claims26