Contact-free photomixing probe for device and integrated circuit measurement or characterization
AssigneeWright State University
InventorElliott R. Brown
Life of this patent
Estimating the term…
Abstract
A device for measuring and characterizing solid-state devices or integrated circuits at RF frequencies up to 1.0 THz and beyond is provided that includes a transmitting photomixing probe structure and a receiving photomixing probe structure. The transmitting photomixing probe structure and the receiving photomixing probe structure are ac-coupled to the solid-state device or integrated circuit in a contact-free manner.
Claims20
A device for measuring or characterizing a solid-state device or an integrated circuit at frequencies up to 1.0 THz and beyond comprising:
- a transmitting photomixing probe;
- and
- a receiving photomixing probe,
- wherein during measuring or characterizing of the solid-state device or the integrated circuit, the solid-state device or the integrated circuit is embedded in a planar transmission line and the transmitting photomixing probe and the receiving photomixing probe are ac-coupled to the planar transmission line in such a manner that an air gap exists between the transmitting photomixing probe and the planar transmission line, and the receiving photomixing probe and the planar transmission line, thereby the transmitting photomixing probe and the receiving photomixing probe do not come into electrical contact with the planar transmission line.
A method of measuring a solid-state device or an integrated circuit at an RF frequency up to 1.0 THz and beyond comprising:
- providing a transmitting photomixing probe structure and a receiving photomixing probe structure;
- embedding the solid-state device or an integrated circuit in a planar transmission line;
- and
- coupling the transmitting photomixing probe structure and the receiving photomixing probe structure to the planar transmission line in such a manner that an air gap exists between the transmitting photomixing probe structure and the planar transmission line, and the receiving photomixing probe structure and the planar transmission line such that the transmitting photomixing probe and the receiving photomixing probe do not come into electrical contact with the planar transmission line.
Dependencies are inferred from the claim text.