Opto-electronic inspection quality assurance system for fluid dispensing valves
AssigneeEntegris, Inc.
InventorsThomas E. Chatterton, Sebum Cheon
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AssigneeEntegris, Inc.
InventorsThomas E. Chatterton, Sebum Cheon
Estimating the term…
An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assurance determinations, are described. The optoelectronic inspection is applicable to flow control valves used on fluid storage and dispensing packages including physical adsorbent-based and/or pressure-regulated vessels, such as are used for supply of processing fluids used in the manufacture of semiconductor products, flat panel displays, and solar panels.
An optoelectronic inspection system for determining acceptability of a valve structure, comprising:
A method for determining acceptability of a valve structure, comprising:
A non-transitory computer readable medium storing machine-executable instructions which when executed carry out a quality assurance determination of a fluid dispensing valve including valve structure on which light has been impinged to produce an imaging response optoelectronically converted to an optoelectronic imaging output, wherein said optoelectronic imaging output is processed according to said machine-executable instructions to generate an inspection output indicative of whether the valve structure satisfies predetermined acceptability criteria, comprising constituting image data of said optoelectronic imaging output as an autocorrelation function that then is Fourier transformed to yield an illumination power spectrum for digital comparison to baseline spectra for acceptable valve structure, in generating said inspection output, and wherein the inspection output comprises a quality assurance determination as a visual output to a display screen.
Dependencies are inferred from the claim text.