Micro-electro-mechanical device and method for making the same
AssigneePixart Imaging Incorporation
InventorMing-Han Tsai
Life of this patent
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Abstract
The invention provides a micro-electro-mechanical device which includes a substrate, an electrode, and a diaphragm. The electrode includes plural vent holes. The diaphragm is disposed above and in parallel to the electrode, to form a capacitive sensor with the electrode. The diaphragm includes plural ribs protruding upward and/or downward from the diaphragm; the ribs are respectively disposed in correspondence to the plural vent holes and do not overlap nor contact the electrode. A method for making the micro-electro-mechanical device is also provided according to the present invention.
Claims18
A micro-electro-mechanical device, comprising:
- a substrate, a first metal layer above the substrate, a via layer above the first metal layer, and a second metal layer above the via layer;
- an electrode, including a plurality of vent holes;
- and
- a diaphragm, including a planar layer and a plurality of ribs, wherein the planar layer is disposed above and in parallel to the electrode to form a capacitive sensor with the electrode, and the ribs protrude upward and/or downward from the planar layer such that the ribs are respectively disposed in correspondence to the vent holes, wherein the ribs are smaller than and within the vent holes from a top view having a direction normal to the substrate, such that the ribs do not contact the electrode and do not overlap the electrode from the top view;
- wherein each of the ribs at least includes the via layer and the second metal layer which are located in correspondence to the vent holes and are stacked such that a whole interface between the via layer and the second metal layer is in parallel to the planar layer, and the via layer and the second metal layer are different layers from the planar layer and do not belong to a part of the planar layer.
A method of making micro-electro-mechanical device, comprising:
- providing a substrate, a first metal layer above the substrate, a via layer above the first metal layer, and a second metal layer above the via layer;
- forming an electrode having a plurality of vent holes;
- forming a spacer on the substrate;
- and
- forming a diaphragm which includes a planar layer and a plurality of ribs, wherein the planar layer is connected to the spacer so that the diaphragm forms a capacitor sensor with the electrode, and the ribs protrude upward and/or downward from the planar layer such that the ribs are respectively disposed in correspondence to the vent holes, wherein the ribs are smaller than and within the vent holes from a top view having a direction normal to the substrate, such that the ribs do not contact the electrode and do not overlap the electrode from the top view;
- wherein each of the ribs at least includes the via layer and the second metal layer which are located in correspondence to the vent holes and are stacked such that a whole interface between the via layer and the second metal layer is in parallel to the planar layer, and the via layer and the second metal layer are different layers from the planar layer and do not belong to a part of the planar layer.
Dependencies are inferred from the claim text.