Fluid pressure sensor
AssigneeHella KGaA Hueck & Co.
InventorsThomas Niemann, Jurgen Palloks
Life of this patent
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Abstract
In a fluid pressure sensor with a pressure sensing membrane and an electronic circuit, the electronic circuit is in a section realized so thin that a membrane is formed in this section of the electronic circuit. In the other sections, the electronic circuit is realized thicker than in the section that forms the membrane. This makes it possible to manufacture a particularly compact fluid pressure sensor.
Claims5
A fluid pressure sensor with a pressure sensing membrane and an electronic circuit, wherein the electronic circuit is in a section realized so thin that this section of the electronic circuit forms the membrane, and wherein the electronic circuit is in other sections realized thicker than in the section that forms the membrane,
- wherein a reference chamber is arranged on the electronic circuit above the section that forms the membrane, the electronic circuit and the reference chamber are completely enclosed by a thermoplastic except for the section, in which the membrane is realized, and the thermoplastic directly abuts on a housing,
- the housing is cylindrical,
- the housing has an outer circumferential wall with a constant outer diameter throughout the entire axial length of the housing and a thread for attaching the fluid pressure sensor formed on the outer circumferential wall,
- a length of the electronic circuit is larger than 50% of an inside diameter of the housing, in which the electronic circuit is accommodated, and
- the electronic circuit and the reference chamber are entirely accommodated in the housing.
Dependencies are inferred from the claim text.