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US 9,518,868 B2Granted
Infrared detector with metal-black coating having dielectric overlayer and related methods
AssigneeUniverity of Central Florida Reseach Foundation, Inc.
InventorDeep Panjwani
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Abstract
An infrared (IR) detector may include a substrate, circuitry carried by the substrate, and a metal-black layer over the thermometric element. The circuitry may include a thermometric element with a measurable thermometric property. The IR detector may include a dielectric layer covering the metal-black layer, and the circuitry provides a value for IR radiation absorbed by the metal-black layer.
Claims16
An infrared (IR) detector comprising:
- a substrate;
- circuitry carried by said substrate;
- said circuitry comprising a thermometric element with a measurable thermometric property;
- a gold-black layer over said thermometric element;
- and
- a dielectric layer covering said gold-black layer;
- said circuitry providing a value for IR radiation absorbed by said gold-black layer.
4 more elements
A method for making an infrared (IR) detector comprising:
- forming a photoresist pattern layer on a substrate;
- forming a metal-black layer over the substrate and the photoresist pattern layer, the metal-black layer to be coupled to circuitry on the substrate;
- forming a dielectric layer covering the metal-black layer;
- and
- removing the photoresist pattern layer together with a portion of the metal-black layer residing on top of it without removing a remainder of the metal-black layer.
2 more elements
A method for making an infrared (IR) detector comprising:
- forming a photoresist pattern layer on a substrate;
- forming a gold-black layer over the photoresist pattern layer and the substrate, the gold-black layer to be coupled to circuitry on the substrate;
- forming a silicon dioxide layer covering the gold-black layer;
- and
- removing the photoresist pattern layer together with the gold-black layer residing on top of it without removing a remainder of the gold-black layer.
2 more elements
Dependencies are inferred from the claim text.