Elastic wave element and elastic wave sensor using same
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsShigeru Tsuzuki, Kazunori Nishimura, Hiroyuki Nakamura, Tomohiro Iwasaki
Life of this patent
Estimating the term…
Loading patent…
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsShigeru Tsuzuki, Kazunori Nishimura, Hiroyuki Nakamura, Tomohiro Iwasaki
Estimating the term…
An acoustic wave element includes a piezoelectric substrate, an excitation electrode configured to excite and output a main acoustic wave on the piezoelectric substrate, a receiving electrode configured to receive the main acoustic wave, a propagation path configured to allow the main acoustic wave to propagate along the piezoelectric substrate between the excitation electrode and the receiving electrode, and a sensing portion configured to react to an object substance. The propagation path is configured to allow the main acoustic wave to pass plural times through the sensing portion along the propagation path. This acoustic wave element has high sensitivity to the object substance.
An acoustic wave element comprising:
An acoustic wave element comprising:
Dependencies are inferred from the claim text.