Atomic layer deposition processing apparatus to reduce heat energy conduction

An atomic layer deposition processing apparatus comprising:

• a chamber lid assembly including:
• a gas dispersing channel, connected to a first gas delivery system and a second gas delivery system, the gas dispersing channel extending along a central vertical axis and having an upper portion and a lower portion, the upper portion having a cylindrical shape along the central vertical axis and the lower portion having a conical shape tapering away from the central vertical axis and extending along a horizontal axis;
• a first heater element and a first temperature sensor, integral to a bottom wall of the chamber lid assembly that is located above the lower portion of the gas dispersing channel, the first temperature sensor configured to detect a first temperature at a first location at a first side relative to the central vertical axis and configured to output first temperature information corresponding to the first temperature to a temperature comparator, and
• a choke connected to the bottom wall of the chamber lid assembly;
• a susceptor spaced a distance from the chamber lid assembly and extending along the horizontal axis, the susceptor including a substrate receiving surface, a second heater configured to heat a surface adjacent the substrate receiving surface and a second temperature sensor configured to detect a second temperature at a second location at a second side opposing the first side relative to the central vertical axis, and configured to output second temperature information corresponding to the second temperature to the temperature comparator;
• a process chamber enclosing at least the chamber lid assembly and the susceptor, the process chamber that is connected to the bottom wall of the chamber lid assembly by one or more thermal attenuation parts, wherein the thermal attenuation parts attenuate heat energy generated by the first heater;
• the temperature comparator configured to:
• compare the first temperature information with the second temperature information;
• and
• determine a temperature difference between the first temperature and the second temperature;
• and
• a controller configured to:
• control the first gas delivery system and the second gas delivery system to supply gases to the substrate alternately;
• and
• control the first heater or the second heater so that the temperature difference between the first temperature at the first location and the second temperature at the second location is decreased,
• wherein an outside edge of the cover is arranged further outward in a horizontal direction from the central vertical axis than a corresponding outside edge of the substrate on the susceptor, and
• wherein an outside edge of an element of the first heater embedded in the cover is arranged further outward in a horizontal direction from the central vertical axis than a corresponding outside edge of the substrate on the susceptor.