Recovery system and methods for MEMS devices

A method to recover from stiction between two components of a MEMS device, the method comprising:

• receiving a first signal;
• detecting a stiction event based on the first signal;
• generating a second signal in response to detecting the stiction event;
• and
• applying the second signal to a mechanical structure to cause an electrostatic force.

A system to recover from stiction between two components of a MEMS device, the system comprising:

• a MEMS device that generates a first readout signal;
• a readout circuit coupled to receive the first readout signal and convert it into a second readout signal;
• a stiction detection circuit coupled to the readout circuit, the stiction detection circuit detects a stiction event based on the second readout signal;
• and
• a stiction recovery circuit coupled to the stiction detection circuit, the stiction recovery circuit generates a voltage signal in response to detecting the stiction event and applies the voltage signal to at least one electrode of the MEMS device to cause an electrostatic force.