Clean storage packaging article and method for making and using

A method for storing clean items, comprising:

• obtaining a packaging article made of fluoropolymer material, the packaging article having been cleaned according to a process comprising steps of:
• placing the packaging article in contact with a solution comprising an organic solvent, then rinsing the packaging article with ultrapure water;
• placing the packaging article in contact with an acid solution, then rinsing the packaging article with ultrapure water;
• and
• drying the packaging article to produce the packaging article having an interior surface with:
• less than 1×1010 atoms/cm2 of each of the following metals:
• aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
• less than 1×1010 ions/cm2 for each of the following anions:
• fluoride, chloride, nitrite, sulfate, and phosphate;
• and
• less than 2 nanogram/cm2 of each of the following organic compounds:
• compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms;
• placing an item or items inside the packaging article;
• and
• sealing the packaging article.

A method of making a packaging article for clean semiconductor and microelectronic devices, components, and sub-assemblies comprising:

• providing the packaging article made of a fluoropolymer material;
• producing the packaging article having an interior surface with:
• less than 1×1010 atoms/cm2 of each of the following metals:
• aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
• less than 1×1010 ions/cm2 for each of the following anions:
• fluoride, chloride, nitrite, sulfate, and phosphate;
• and
• less than 2 nanogram/cm2 of each of the following organic compounds:
• compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms, by contacting the packaging article with a solution comprising an organic solvent, rinsing the packaging article with ultrapure water, contacting the packaging article with an acid solution, and rinsing the packaging article with ultrapure water, and drying the packaging article.

A method of making a packaging article for clean items, comprising:

• providing a packaging article made of a fluoropolymer material;
• placing the packaging article in contact with a solution comprising an organic solvent selected from the group consisting of methanol, ethanol, acetone and benzene, then rinsing the packaging article with ultrapure water;
• placing the packaging article in contact with an acid solution, then rinsing the packaging article with ultrapure water;
• and
• drying the packaging article to produce the packaging article having an interior surface with:
• less than 1×1010 atoms/cm2 of each of the following metals:
• aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
• less than 1×1010 ions/cm2 for each of the following anions:
• fluoride, chloride, nitrite, sulfate, and phosphate;
• and
• less than 2 nanogram/cm2 of each of the following organic compounds:
• compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms.