Method of producing color filter and solid-state imaging device having colored composition containing color agent
AssigneeFUJIFILM Corporation
InventorsKaoru Aoyagi, Naotsugu Muro, Mitsuji Yoshibayashi, Yushi Kaneko, Yasuo Sugishima
Life of this patent
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Abstract
The invention is directed to a colored composition containing a coloring agent and a resin, wherein a content of the coloring agent to a total solid content of the colored composition is 50% by weight or more and a solid content acid value of the resin is more than 80 mg KOH/g, and a method of producing a color filter including forming a first colored layer containing a first colored composition and patterning with dry etching so as to from a through-hole group in the first colored layer, wherein the first colored composition is the colored composition as defined herein.
Claims22
A method of producing a color filter comprising (A) a step of forming a first colored layer comprising a first colored composition, (B) a step of patterning with dry etching so as to from a through-hole group in the first colored layer, wherein the through-hole group comprises a first through-hole part group and a second through-hole part group, (C) a step of stacking a second colored radiation-sensitive layer comprising a second colored radiation-sensitive composition on the first colored layer so as that an inside of each through-hole of the first through-hole part group and second through-hole part group is filled with the second colored radiation-sensitive composition to form a plurality of second colored pixels, (D) a step of exposing and developing a position of the second colored radiation-sensitive layer corresponding to the first through-hole part group provided in the first colored layer to remove the second colored radiation-sensitive layer and the plurality of second colored pixels formed in the inside of each through-hole of the second through-hole part group provided in the first colored layer, (E) a step of stacking a third colored radiation-sensitive layer comprising a third colored radiation-sensitive composition on the first colored layer so as that an inside of each through-hole of the second through-hole part group is filled with the third colored radiation-sensitive composition to form a plurality of third colored pixels, and (F) a step of exposing and developing a position of the third colored radiation-sensitive layer corresponding to the second through-hole part group provided in the first colored layer to remove the third colored radiation-sensitive layer,
- wherein the first colored composition comprises a coloring agent and a resin, the content of the coloring agent with respect to a total solids content of the first colored composition is 50% by weight or more, and the resin has a solid content acid value of more than 80 mg KOH/g.
A method of producing a color filter comprising (A) a step of forming a first colored layer comprising a first colored composition, (B) a step of patterning with dry etching so as to from a through-hole group in the first colored layer, wherein the through-hole group is a plurality of first through-holes, (C′) a step of stacking a second colored layer comprising a second colored composition on the first colored layer so as that an inside of each of the first through-holes is filled with the second colored composition to form a plurality of second colored pixels, (D′) a step of forming a plurality of first colored pixels by patterning with dry etching so as to form a plurality of second through-holes different from the plurality of first through-holes in the first colored layer, (D″) a step of conducting a planarization treatment of the second colored layer until at least the first colored layer is revealed, (E) a step of stacking a third colored radiation-sensitive layer comprising a third colored radiation-sensitive composition on the first colored layer so as that an inside of each of plurality of second through-holes is filled with the third colored radiation-sensitive composition to form a plurality of third colored pixels, and (F) a step of exposing and developing a position of the third colored radiation-sensitive layer corresponding to the plurality of second through-holes provided in the first colored layer to remove the third colored radiation-sensitive layer, and wherein (D″) the step of conducting a planarization treatment is conducted either after (C′) the step of stacking a second colored layer and before (D′) the step of patterning with dry etching or after (D′) the step of patterning with dry etching and before (E) the step of stacking a third colored radiation-sensitive layer,
- wherein the first colored composition comprises a coloring agent and a resin, the content of the coloring agent with respect to a total solids content of the first colored composition is 50% by weight or more, and the resin has a solid content acid value of more than 80 mg KOH/g.
A method of producing a color filter comprising (A) a step of forming a first colored layer comprising a first colored composition, (B) a step of patterning with dry etching so as to from a through-hole group in the first colored layer, wherein the through-hole group is a plurality of first through-holes, (C′) a step of stacking a second colored layer comprising a second colored composition on the first colored layer so as that an inside of each of the first through-holes is filled with the second colored composition to form a plurality of second colored pixels, (D′) a step of forming a plurality of first colored pixel by patterning with dry etching so as to form a plurality of second through-holes different from the plurality of first through-holes in the first colored layer, (E′) a step of stacking one or more colored layers including a third colored layer comprising a third colored composition on the first colored layer so as that an inside of each of plurality of second through-holes is filled with the third colored composition to form a plurality of third colored pixels, and (F′) a step of conducting a planarization treatment of the one or more colored layers stacked on the first colored layer until at least the first colored layer is revealed,
- wherein the first colored composition comprises a coloring agent and a resin, the content of the coloring agent with respect to a total solids content of the first colored composition is 50% by weight or more, and the resin has a solid content acid value of more than 80 mg KOH/g.
Dependencies are inferred from the claim text.