Electrically insulating elements and electrically conductive elements formed from elements having different oxidation behaviors

A method of forming an electro-mechanical device using an oxidation process, the method comprising:

• forming a metallic element which is to become an electrically insulating or resistive element;
• forming an electrically conductive element, wherein the metallic element and the electrically conductive element have different oxidation behavior when subjected to the oxidation process;
• and
• subjecting the elements forming the electrically insulating or resistive element and the electrically conductive element to the oxidation process,
• whereby, in the electro-mechanical device formed using the oxidation process, one or both of the electrically insulating or resistive element and the electrically conductive element suspend an element of the electro-mechanical device, at least partially, above and spaced apart from a substrate or at least one other element of the electro-mechanical device,
• wherein the electrically conductive element provides an electrical pathway to the suspended element, and the electrically insulating or resistive element does not.