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US 9,439,294 B2Granted
Reaction products of heterocyclic nitrogen compounds polyepoxides and polyhalogens
AssigneeRohm and Haas Electronic Materials LLC
InventorsJulia Kozhukh, Zuhra I. Niazimbetova
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Abstract
Reaction products of heterocyclic nitrogen compounds, polyepoxide compounds and polyhalogen compounds may be used as levelers in metal electroplating baths, such as copper electroplating baths, to provide good throwing power. Such reaction products may plate metal with good surface properties and good physical reliability.
Claims3
A method comprising:
- a) providing a substrate;
- b) providing a composition comprising one or more sources of metal ions, an electrolyte and one or more compounds comprising a reaction product of one or more heterocyclic nitrogen compounds comprising at least two reactive nitrogen atoms with the proviso that at least one of the reactive nitrogen atoms is in the ring of the one or more heterocyclic nitrogen compounds;
- one or more polyepoxide compounds and one or more polyhalogen compounds;
- c) contacting the substrate with the composition;
- d) applying a current to the substrate and the composition;
- and
- e) depositing a metal on the substrate.
4 more elements
Dependencies are inferred from the claim text.