Acoustic structure comprising at least one resonator and at least one cointegrated capacitor in one and the same piezoelectric or ferroelectric layer

An acoustic structure comprising at least one acoustic resonator exhibiting a transduction zone and at least one resonant frequency in a band of operating frequencies and an integrated capacitor, said acoustic structure comprising:

• a stack of layers, comprising at least one active layer of a piezoelectric material or of a ferroelectric material;
• the at least one acoustic resonator being frequency tunable and being produced by a first subset of layers of said stack of layers comprising said at least one active layer and at least two electrodes;
• the integrated capacitor being produced by a second subset of layers comprising one of said at least one active layer and said at least two electrodes;
• and
• the first and second subsets of layers being distinguished by a modification of layers to exhibit different resonant frequencies,
• wherein the at least one acoustic resonator formed by the first subset of layers comprises:
• a first transduction zone exhibiting a first active layer of piezoelectric material or of ferroelectric material and at least two electrodes and
• a second frequency-tuning zone exhibiting a second active layer of ferroelectric material and at least two electrodes;
• and
• the active layer of the integrated capacitor formed by the second subset of layers is the first or the second active layer of the at least one acoustic resonator, the at least one acoustic resonator further comprising:
• means of frequency-driving of the resonator linked to the at least two electrodes in a tuning zone of the at least one acoustic resonator and to the at least two electrodes of the integrated capacitor, wherein a value of the integrated capacitor is equal or proportional to a value of a capacitance exhibited by the tuning zone.

An acoustic structure comprising at least one acoustic resonator exhibiting a transduction zone and at least one resonant frequency in a band of operating frequencies and an integrated capacitor, said acoustic structure comprising:

• a stack of layers, comprising at least one active layer of a piezoelectric material or of a ferroelectric material;
• the at least one acoustic resonator being frequency tunable and being produced by a first subset of layers of said stack of layers comprising said at least one active layer and at least two electrodes;
• the integrated capacitor being produced by a second subset of layers comprising one of said at least one active layer and said at least two electrodes;
• and
• the first and second subsets of layers being distinguished by a modification of layers to exhibit different resonant frequencies,
• wherein the at least one acoustic resonator formed by the first subset of layers comprises:
• a first transduction zone exhibiting a first active layer of piezoelectric material or of ferroelectric material and at least two electrodes and
• a second frequency-tuning zone exhibiting a second active layer of ferroelectric material and at least two electrodes;
• and
• the one active layer of the integrated capacitor formed by the second subset of layers is the first or the second active layer of the at least one acoustic resonator,
• wherein the at least two electrodes of the transduction zone of the at least one acoustic resonator and the at least two electrodes of the capacitor are produced in the same layer or layers of the stack and exhibit the same geometry.

An acoustic structure comprising at least one acoustic resonator exhibiting a transduction zone and at least one resonant frequency in a band of operating frequencies and an integrated capacitor, said acoustic structure comprising:

• a stack of layers, comprising at least one active layer of a piezoelectric material or of a ferroelectric material;
• the at least one acoustic resonator being frequency tunable and being produced by a first subset of layers of said stack of layers comprising said at least one active layer and at least two electrodes;
• the integrated capacitor being produced by a second subset of layers comprising one of said at least one active layer and said at least two electrodes;
• the first and second subsets of layers being distinguished by a modification of layers to exhibit different resonant frequencies;
• and
• a bridge structure comprising two of the at least one acoustic resonator coupled electrically to two of the integrated capacitors.