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US 9,438,201 B2Granted
Composite substrates for acoustic wave elements, and acoustic wave elements
AssigneeNGK Insulators, Ltd.
InventorsYuji Hori, Tomoyoshi Tai
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Abstract
A composite substrate for an acoustic wave element includes a support substrate 1 and a propagation substrate 3 for propagating an acoustic wave. The propagation substrate is bonded to the support substrate 1 and composed of a piezoelectric single crystal. The propagation substrate 3 includes a surface lattice distortion layer 11 in which crystal lattices of the piezoelectric single crystal are distorted.
Claims12
A composite substrate for an acoustic wave element:
- said acoustic wave element comprising a support substrate and a propagation substrate for propagating an acoustic wave, said propagation substrate being bonded to said support substrate and comprising a piezoelectric single crystal;
- wherein said propagation substrate comprises a bonding face to be bonded to said support substrate and a surface on the opposite side of said bonding face;
- wherein said propagation substrate comprises a surface lattice distortion layer on the side of said surface on the opposite side of said bonding face and in which crystal lattices of said piezoelectric single crystal are distorted;
- and
- wherein said surface lattice distortion layer has a thickness of 15 nm or smaller.
2 more elements
Dependencies are inferred from the claim text.