Member for semiconductor manufacturing apparatus
AssigneeNGK Insulators, Ltd.
InventorsHideaki Takasaki, Takashi Kataigi
Life of this patent
Estimating the term…
Abstract
A member for a semiconductor manufacturing apparatus includes an electrostatic chuck, a cooling unit, a spacer (an O-ring, an outer periphery spacer, or the like) for securing a gap placed between the electrostatic chuck and the cooling unit, and a clamp ring placed on the upper surface of the outer periphery of the electrostatic chuck. The clamp ring is fastened to the cooling unit with screws. The screws are inserted into coil springs that prevent loosening, and are fastened to nuts. The coil springs are attached not to the clamp ring side but to the cooling unit side.
Claims8
A member for a semiconductor manufacturing apparatus, including:
- an electrostatic chuck, a cooling unit, a spacer for securing a gap placed between the electrostatic chuck and the cooling unit, and an insulating spacer interposed between a clamp ring and an upper surface of the outer periphery of the electrostatic chuck, the electrostatic chuck and the cooling unit are fixed to each other by fastening the clamp ring to the cooling unit with screws,
- wherein the screws are inserted into coil springs that prevent loosening, and are tightened such that a space having a vertical clearance and no direct contact between the clamp ring and the cooling unit is formed, and,
- the coil springs are attached not to the clamp ring side but to the cooling unit side.
Dependencies are inferred from the claim text.