Phase change memory structures and methods
AssigneeMicron Technology, Inc.
InventorSanh D. Tang
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AssigneeMicron Technology, Inc.
InventorSanh D. Tang
Estimating the term…
A method of forming a phase change material memory cell includes forming a number of memory structure regions, wherein the memory structure regions include a bottom electrode material and a sacrificial material, forming a number of insulator regions between the number of memory structure regions, forming a number of openings between the number of insulator regions and forming a contoured surface on the number of insulator regions by removing the sacrificial material and a portion of the number of insulator regions, forming a number of dielectric spacers on the number of insulator regions, forming a contoured opening between the number of insulator regions and exposing the bottom electrode material by removing a portion of the number of dielectric spacers, and forming a phase change material in the opening between the number of insulator regions.
A memory cell, comprising:
A memory cell, comprising:
An array of memory cells, comprising:
Dependencies are inferred from the claim text.