Piezoelectric thin film, method of manufacturing the same, piezoelectric thin film manufacturing apparatus and liquid ejection head

A piezoelectric thin film manufacturing method comprising:

• a step of preparing a substrate having a coating layer formed thereon, the coating layer containing an organic solvent and a piezoelectric thin film precursor;
• a step of obtaining a dried coating layer containing the piezoelectric thin film precursor by evaporating the organic solvent from the coating layer in a state where a shield plate is arranged between an exhaust port for expelling an exhaust of the evaporated organic solvent and the substrate;
• and
• a step of heating the dried coating layer to form a piezoelectric thin film from the dried coating layer containing the piezoelectric thin film precursor.